Fabrication of Switches on Polymer-Based by Hot Embossing
نویسندگان
چکیده
In MEMS technology, most of the devices are fabricated on glass or silicon substrate. However, this research presents a novel manufacture method that is derived from conventional hot embossing technology to fabricate the electrostatic switches on polymer material. The procedures of fabrication involve the metal deposition, photolithography, electroplating, hot embossing and hot embed techniques. The fundamental concept of the hot embed technology is that the temperature should be increased above Tg of polymer, and the polymer becomes plastic and viscous and could be molded. According to the fundamental concept, the metal layer on the silicon/glass substrate could be embedded into polymer material during the hot embossing process. Afterward, the metal layer is bonded together with the polymer after removing the substrate in the de-embossing step. Finally, the electrostatic switch is fabricated on polymethylmethacrylate(PMMA) material to demonstrate the novel method.
منابع مشابه
Fabrication of Polymer Splitter by Micro Hot Embossing Technique
This research focuses on the manufacturing of 1 by 4 multimode polymer splitter. MEMS fabricating process was first adopted for the fabrication of four inches silicon mold insert and then the micro hot embossing technique was applied to the optical class PMMA material for splitters. The BeamPROPTM simulation software was utilized for the design of optimal silicon mold insert. In the analysis of...
متن کاملPrecision manufacturing methods of inserts for injection molding of microfluidic systems
Manufacturing of tools for micro injection molding and hot embossing of microfluidic systems can be realized by several different process sequences, mainly based on combinations of photolithography, etching and electrodeposition. The paper presents a classification of the available process sequence alternatives and proposes a new solution based on generation of the pattern by mechanical or ther...
متن کاملPMMA Solution Assisted Room Temperature Bonding for PMMA–PC Hybrid Devices
Recently, thermoplastic polymers have become popular materials for microfluidic chips due to their easy fabrication and low cost. A polymer based microfluidic device can be formed in various fabrication techniques such as laser machining, injection molding, and hot embossing. A new bonding process presented in this paper uses a 2.5% (w/w) polymethyl methacrylate (PMMA) solution as an adhesive l...
متن کاملProcess Issues for a Multi-Layer Microelectrofluidic Platform
We report on the development of some process capabilities for a polymer-based, multi-layer microelectrofluidic platform, namely: the hot embossing process, metallization on polymer and polymer bonding. Hot embossing experiments were conducted to look at the effects of load applied, embossing temperature and embossing time on the fidelity of line arrays representing micro channels. The results r...
متن کاملDual fiber optical trapping in a polymer-based microfluidic chip
We present a microfluidic chip in Polymethyl methacrylate (PMMA) for optical trapping of particles in an 80μm wide microchannel using two counterpropagating single-mode beams. The trapping fibers are separated from the sample fluid by 70μm thick polymer walls. We calculate the optical forces that act on particles flowing in the microchannel using wave optics in combination with non-sequential r...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- CoRR
دوره abs/0711.3334 شماره
صفحات -
تاریخ انتشار 2006